JPS6342138Y2 - - Google Patents
Info
- Publication number
- JPS6342138Y2 JPS6342138Y2 JP34085U JP34085U JPS6342138Y2 JP S6342138 Y2 JPS6342138 Y2 JP S6342138Y2 JP 34085 U JP34085 U JP 34085U JP 34085 U JP34085 U JP 34085U JP S6342138 Y2 JPS6342138 Y2 JP S6342138Y2
- Authority
- JP
- Japan
- Prior art keywords
- support
- wafer carrier
- pair
- corrosion
- swinging
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 38
- 238000005260 corrosion Methods 0.000 claims description 21
- 230000007797 corrosion Effects 0.000 claims description 21
- 239000000463 material Substances 0.000 claims description 15
- 238000003466 welding Methods 0.000 claims description 12
- 238000012993 chemical processing Methods 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000012545 processing Methods 0.000 claims description 2
- 239000000126 substance Substances 0.000 description 25
- 239000000969 carrier Substances 0.000 description 10
- 238000004140 cleaning Methods 0.000 description 9
- 239000002184 metal Substances 0.000 description 8
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000005530 etching Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000002351 wastewater Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910000975 Carbon steel Inorganic materials 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000010962 carbon steel Substances 0.000 description 1
- 229920006026 co-polymeric resin Polymers 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000010129 solution processing Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34085U JPS6342138Y2 (en]) | 1985-01-07 | 1985-01-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34085U JPS6342138Y2 (en]) | 1985-01-07 | 1985-01-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61116765U JPS61116765U (en]) | 1986-07-23 |
| JPS6342138Y2 true JPS6342138Y2 (en]) | 1988-11-04 |
Family
ID=30472092
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP34085U Expired JPS6342138Y2 (en]) | 1985-01-07 | 1985-01-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6342138Y2 (en]) |
-
1985
- 1985-01-07 JP JP34085U patent/JPS6342138Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61116765U (en]) | 1986-07-23 |
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